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半导体激光器
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THz近场扫描成像



太赫兹成像
THz Near-field Micro-probe Scanning Imaging


太赫兹材料研究
太赫兹器件表征
半导体晶圆检测
显微组织分析
无损检测


TeraCube Scientific THz Near-field Scanning System

Spectal Range

0.05-4THz

Max Sample Size XYZ

20×20×1cm

Max Scanning Range XYZ

18×18×0.3cm

Max Scanning Speed XY

750mm/s

Min Scanning Time Per Pixel

10ms

Time-domain Scanning Range width

1000ps

Time-domain Step Resolution

6.6fs

Min Bi-directional Repeatability XYZ

±0.1±0.1±0.15μm

Min Step Resolution XYZ

3×3×2nm

Installation Requirement

Vibration-damped Optical Table with 1×1×1m of Space for System Placement

Laser Laboratory Specification of Class 3b or Higher

fs-Laser Requirement

Center Wavelength

770-820nm

Pulse Duration

<150fs

Repetition Rate

10MHz to 1GHz

Avg Optical Power

60mW to 1.5W






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